Chi Guo

Title: Chi Guo - Innovator in Automated Tracking Systems

Introduction

Chi Guo is a notable inventor based in Cupertino, CA, who has made significant contributions to the field of automated tracking systems. With a focus on developing solutions for hostile environments, her work has led to the creation of innovative technologies that enhance operational efficiency.

Latest Patents

Chi Guo holds a patent for a "Robust belt tracking and control system for hostile environment." This automated tracking and control system measures the lateral displacement of a moving belt using non-contact sensing. The system employs an algorithm that adjusts the tilts of the belt pulleys and steers the belt laterally. Non-contact sensors, including inductive proximity sensors, respond to the metal belt while remaining immune to airborne slurry and other non-metallic debris typical of wafer polishing environments. The system also utilizes shielded optical sensors and dual sensor configurations to cancel responses to non-lateral displacements. Additionally, instrumentation such as tension sensors, cylinder pressure sensors, load transducers, and limit switches provide input to the algorithm, ensuring proper functioning of components like pad conditioners. User-specified belt displacements, such as dither, sawtooth oscillation, step, ramp, and sweep, combine with selective texturing and other variable pad properties to achieve a desired polishing rate profile.

Career Highlights

Chi Guo is currently employed at Aplex, Inc., where she continues to innovate and develop advanced technologies. Her work has been instrumental in enhancing the capabilities of automated systems in challenging environments.

Collaborations

Chi collaborates with talented individuals such as Mike Chao and Tim H Huynh, contributing to a dynamic team focused on pushing the boundaries of technology.

Conclusion

Chi Guo's contributions to automated tracking systems exemplify her commitment to innovation and excellence in engineering. Her patent and ongoing work at Aplex, Inc. highlight her role as a leading inventor in her field.