This inventor holds 2 USPTO granted patents. Top assignee: Samsung Electronics Co., Ltd.. Active years: 2006-2009.
Company Filing History:
Years Active: 2006-2009
Title: Innovations by Cheon-su Han
Introduction
Cheon-su Han is a notable inventor based in Seoul, South Korea. He has made significant contributions to the field of semiconductor device fabrication. With a total of 2 patents, his work focuses on improving the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Cheon-su Han's latest patents include a method of cleaning semiconductor device fabrication apparatus. This innovative method involves cleaning the apparatus after a conductive layer is formed on a metal oxide layer of a substrate. The substrate is placed on a heater within a process chamber, where the conductive layer is created by introducing source gases. After the substrate is transferred out of the chamber, by-products from the reaction between the source gases and the metal oxide layer adhere to the chamber's surfaces. These by-products are then removed by evaporation, utilizing gas such as one of the source gases, allowing the process chamber to remain closed.
Career Highlights
Cheon-su Han is currently employed at Samsung Electronics Co., Ltd., a leading company in the electronics industry. His work at Samsung has allowed him to develop and refine his innovative methods in semiconductor fabrication.
Collaborations
Some of his notable coworkers include In-su Ha and Yoon-bon Koo, who contribute to the collaborative environment that fosters innovation at Samsung.
Conclusion
Cheon-su Han's contributions to semiconductor device fabrication highlight his expertise and innovative spirit. His patents reflect a commitment to advancing technology in the electronics sector.