Company Filing History:
Years Active: 2019
Title: Chengzhu Qi: Innovator in Plasma Processing Technology
Introduction
Chengzhu Qi is a notable inventor based in Tualatin, Oregon, who has made significant contributions to the field of plasma processing technology. With a focus on enhancing the efficiency and effectiveness of semiconductor manufacturing processes, Qi's work has garnered attention in the industry.
Latest Patents
Chengzhu Qi holds a patent for a "Carrier ring wall for reduction of back-diffusion of reactive species and suppression of local parasitic plasma ignition." This innovative design features a carrier ring that supports a substrate during transport and processing. The carrier ring is defined by an inner annular portion, a middle annular portion, and an outer annular portion, each with varying thicknesses to optimize performance and minimize unwanted plasma ignition.
Career Highlights
Qi is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has allowed him to apply his expertise in plasma processing to develop solutions that enhance manufacturing efficiency.
Collaborations
Chengzhu Qi has collaborated with notable colleagues, including Yukinori Sakiyama and Bin Luo. These partnerships have contributed to the advancement of technologies in the semiconductor field.
Conclusion
Chengzhu Qi's innovative contributions to plasma processing technology and his patent for a carrier ring design highlight his role as a key inventor in the semiconductor industry. His work continues to influence advancements in manufacturing processes.