Average Co-Inventor Count = 7.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (1 from 3,783 patents)
1 patent:
1. 10475627 - Carrier ring wall for reduction of back-diffusion of reactive species and suppression of local parasitic plasma ignition