Cheng-Yen Liu

Title: Cheng-Yen Liu: Innovator in Microstructure Fabrication

Introduction

Cheng-Yen Liu is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of microstructure fabrication, showcasing his expertise through innovative patent developments. His work is particularly relevant in the realm of micro-electro-mechanical systems (MEMS), which are crucial for various technological applications.

Latest Patents

Cheng-Yen Liu holds a patent titled "Method for Fabricating a Microstructure." This patent describes a method that involves forming at least one insulation layer containing a micro-electro-mechanical structure over a silicon substrate. The micro-electro-mechanical structure includes independent microstructures and a metal sacrificial structure. The process includes forming multiple metal layers and via layers within the sacrificial structure, followed by the creation of a barrier layer and an etching stop layer. An etching operation is then performed to create a space for the microstructure, leading to the successful suspension of the microstructure.

Career Highlights

Cheng-Yen Liu is associated with Memsmart Semiconductor Corporation, where he applies his innovative techniques in semiconductor technology. His work has been instrumental in advancing the capabilities of microstructure fabrication, which is essential for the development of modern electronic devices.

Collaborations

Cheng-Yen Liu has collaborated with notable colleagues such as Sheng-Hung Li and Siew-Seong Tan. These collaborations have further enriched his research and development efforts in the semiconductor field.

Conclusion

Cheng-Yen Liu's contributions to microstructure fabrication through his innovative patent highlight his role as a key inventor in the semiconductor industry. His work continues to influence advancements in technology and micro-electro-mechanical systems.