Location History:
- Taitung, TW (2001)
- Taitung Hsien, TW (2002)
Company Filing History:
Years Active: 2001-2002
Title: Innovations by Cheng-Che Li
Introduction
Cheng-Che Li is a notable inventor based in Taitung County, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the area of photoresist material removal. With a total of 2 patents, his work has advanced processes that are crucial for the manufacturing of integrated circuits.
Latest Patents
Cheng-Che Li's latest patents include a "Process for removing photoresist material" and a "Method for in-situ removing photoresist material." The first patent describes a process that effectively removes photoresist material without leaving any residues or damaging the in-process substrate. This innovative method involves providing a cover layer on the substrate, applying a layer of photoresist material, and then patterning, exposing, and developing the photoresist layer. The developed layer is further exposed without a mask, allowing for precise etching of the cover layer. After etching, the photoresist material is removed using a solvent.
The second patent outlines a method for in-situ removing photoresist material during the etching process of a CMOS photosensor's passivation layer. This method utilizes oxygen in-situ to remove parched photoresist material, performed on a Tegal-903 etching machine. The Tegal-903 offers better stability compared to traditional Asher etching machines, ensuring a stable etching rate that prevents damage to the acrylic material layer and eliminates residual photoresist material.
Career Highlights
Cheng-Che Li is currently employed at United Microelectronics Corporation, a leading semiconductor foundry. His work at the company has been instrumental in enhancing the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Throughout his career, Cheng-Che Li has collaborated with esteemed colleagues such as Yuan-Chi Pai and Lung-Yi Cheng. These collaborations have fostered innovation and contributed to the advancement of technology in their field.
Conclusion
Cheng-Che Li's contributions to the semiconductor industry through his innovative patents demonstrate his expertise and commitment to advancing technology. His work continues to influence the processes used in semiconductor manufacturing, showcasing the importance of innovation in this critical field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.