Company Filing History:
Years Active: 2025
Title: Che-Wei Tung: Innovator in Semiconductor Processing Tools
Introduction
Che-Wei Tung is an inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor processing, focusing on innovative tools and methods that enhance production efficiency. Although he currently holds no granted patents, his work is noteworthy for its potential impact on the semiconductor industry.
Latest Patent Applications
Che-Wei Tung's latest patent application is titled "SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION." This application describes a deposition tool that incorporates a grounding component situated between the edge ring of a substrate stage and a pumping plate component. The grounding component features a grounding strap with a deformation region designed to minimize the risk of the grounding strap rubbing against the surface of the pumping plate during the tool's operation. The material properties of the grounding strap are engineered to reduce the likelihood of plastic deformation during repeated use. This innovation aims to decrease the number of particulates dislodged from the pumping plate's surface, thereby improving the yield of semiconductor products manufactured with the tool. Additionally, it seeks to reduce the frequency of servicing required for the grounding component, which in turn decreases downtime and increases the throughput of semiconductor products.
Conclusion
Che-Wei Tung's contributions to semiconductor processing tools highlight his innovative approach to improving production efficiency in the industry. His latest patent application reflects a commitment to advancing technology in this critical field.