Company Filing History:
Years Active: 2004-2006
Title: Charles S. Kunze: Innovator in Semiconductor Technology
Introduction
Charles S. Kunze is a notable inventor based in Cupertino, CA, specializing in advancements within the semiconductor industry. He holds 2 patents that reflect his innovative contributions to the field. His work primarily focuses on improving the efficiency and longevity of semiconductor manufacturing processes.
Latest Patents
One of Kunze's latest patents involves a method for cleaning a component of a process chamber. This method addresses the issue of process deposits formed on components by mechanically pinning gas holes to facilitate cleaning. The ceramic portion of the component is then treated with an acidic solution, such as a mixture of hydrofluoric acid and nitric acid. Following this, the component undergoes plasma stabilization by introducing a non-reactive gas into a plasma zone. This innovative approach enhances the cleaning process and ensures the reliability of semiconductor manufacturing.
Another significant patent by Kunze focuses on an erosion-resistant slit valve. This invention aims to reduce erosion in slit valves used during semiconductor device fabrication. By positioning non-metallic components, such as a compressible sealing member and a barrier, on the valve seat rather than the closure, the exposure of these components to plasma is minimized. This design effectively extends the lifespan of the valve, contributing to more efficient semiconductor production.
Career Highlights
Charles S. Kunze is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His role involves developing innovative solutions that enhance manufacturing processes and improve product quality. His expertise and contributions have made a significant impact on the field.
Collaborations
Kunze has collaborated with notable colleagues, including Andrew V. Le and Muhammad M. Rasheed. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas within the semiconductor sector.
Conclusion
Charles S. Kunze's contributions to semiconductor technology through his patents and work at Applied Materials, Inc. highlight his role as a key innovator in the industry. His advancements in cleaning methods and erosion-resistant components are paving the way for more efficient semiconductor manufacturing processes.