This inventor holds 2 USPTO granted patents. Top assignee: International Business Machines Corporation. Active years: 1989-1990.
Location History:
- Manassas, VA (US) (1989)
- Manassass, VA (US) (1990)
Company Filing History:
Years Active: 1989-1990
Title: The Innovations of Charles P. Breiten
Introduction
Charles P. Breiten is a notable inventor based in Manassas, VA (US). He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on innovative methods that enhance the manufacturing processes of semiconductor devices.
Latest Patents
Breiten's latest patents include a method for making borderless contacts and a planarization process for wide trench isolation. The first patent describes a process for creating borderless contacts through an insulating layer to active regions of a semiconductor device. This involves the deposition of a silicon nitride layer and an insulation glass layer on a substrate coating semiconductor devices, followed by the etching of contact windows through the glass layer using BCl₂ or CHF₃/CF₄ etch gases. The windows are then etched through the silicon nitride with CH₃F or O₂/CHF₃ gases. The second patent outlines a method of planarizing wide dielectric filled isolation trenches formed in the surface of a semiconductor. A self-aligned mask is created on the thick conformal layer of dielectric in the depressions over the wide trenches to protect the dielectric during the planarization steps.
Career Highlights
Breiten is currently employed at International Business Machines Corporation (IBM), where he continues to innovate in semiconductor technology. His work has been instrumental in advancing the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Throughout his career, Breiten has collaborated with notable colleagues, including David Stanasolovich and Jacob F. Theisen. These collaborations have contributed to the development of cutting-edge technologies in the semiconductor industry.
Conclusion
Charles P. Breiten's contributions to semiconductor technology through his patents and work at IBM highlight his role as an influential inventor in the field. His innovative methods continue to shape the future of semiconductor manufacturing.