Charles H Leung

Title: Innovations of Charles H Leung in Integrated Circuit Technology

Introduction

Charles H Leung is a notable inventor based in San Jose, California. He has made significant contributions to the field of integrated circuit technology, particularly through his innovative patent related to laser planarization techniques.

Latest Patents

One of Charles H Leung's key patents is focused on the laser planarization of nonrefractory metals during integrated circuit fabrication. This patent describes a method where nonrefractory micrometer-thick deposited metals, such as aluminum and aluminum alloy films, are planarized by momentarily melting them with optical pulses from a laser, specifically a xenon chloride excimer laser. The process involves preheating the substrate and any intervening dielectric and conductive layers to about one-half the melting temperature of the metal. This technique enhances the reflow of the metal upon melting, improving planarization and reducing stress in the resolidified metal. The method offers an attractive solution for fabricating multilayer interconnect structures, ensuring excellent step coverage and via filling without damaging lower layers of interconnect.

Career Highlights

Charles H Leung is associated with Xmr, Inc., where he continues to innovate in the field of integrated circuits. His work has been instrumental in advancing technologies that enhance the performance and reliability of electronic devices.

Collaborations

Throughout his career, Charles has collaborated with notable professionals in the industry, including Thomas J Magee and John F Osborne. These collaborations have contributed to the development of cutting-edge technologies in integrated circuit design and manufacturing.

Conclusion

Charles H Leung's contributions to integrated circuit technology through his innovative patent on laser planarization demonstrate his commitment to advancing the field. His work continues to influence the design and fabrication of modern electronic devices.