Company Filing History:
Years Active: 1984-1987
Title: The Innovations of Charles B. Garrett
Introduction
Charles B. Garrett is a notable inventor based in San Jose, California, recognized for his contributions to the field of semiconductor technology. With a total of six patents to his name, Garrett has made significant advancements in sputtering apparatuses and coating techniques.
Latest Patents
One of Garrett's latest patents is a planar magnetron sputtering device with combined circumferential and magnetic fields. This innovative device features an extended flat circular target source positioned in parallel with a flat article to be coated within an evacuated chamber. The establishment of crossed electric and magnetic fields allows for the creation of plasma adjacent to the target, enhancing the coating process. The magnetic assembly, composed of permanent magnets, is designed to move laterally over the target, ensuring improved uniformity and step coverage of the coated articles.
Another significant patent is the workpiece lifting and holding apparatus, which automates the coating of semiconductor wafers. This apparatus utilizes shuttle wafer carriers and elevators to handle wafers efficiently. The design includes a central hole in the wafer carrier and a cantilevered shaft that lifts the wafer while allowing the shuttle to move freely. This innovative approach enhances the handling and processing of semiconductor wafers.
Career Highlights
Throughout his career, Charles B. Garrett has worked with prominent companies such as Varian Associates, Inc. and Gartek Systems, Inc. His experience in these organizations has contributed to his expertise in the field of semiconductor technology and innovation.
Collaborations
Garrett has collaborated with notable individuals in the industry, including Kenneth F. Freeman and David J. Harra. These collaborations have likely influenced his work and contributed to the development of his patented technologies.
Conclusion
Charles B. Garrett's contributions to the field of semiconductor technology through his innovative patents demonstrate his significant impact on the industry. His work continues to influence advancements in coating techniques and apparatus design.