Charles A McKinney

Title: **Innovator Spotlight: Charles A. McKinney**

Introduction

Charles A. McKinney, an esteemed inventor based in Chazy, NY, has made significant contributions to the field of semiconductor processing. With a robust portfolio of three patents, his innovations primarily focus on enhancing chemical mechanical polishing tools and the detection processes associated with semiconductor wafers.

Latest Patents

McKinney's most recent patents showcase his ability to address challenges within the semiconductor industry. One notable innovation is the **Removable/Disposable Platen Top**. This invention comprises a chemical mechanical polishing tool featuring a polishing platen and a removable platen top that can be replaced easily. The platen top is designed with a material that is substantially impervious to slurries used in planarizing objects, preferably made from aluminum alloy or glass. Its design allows for tailored polishing conditions, enhancing performance by acting as an insulator or conductor, and can even be machined to fit concave or convex shapes. Additionally, the invention may include endpoint sensors attached to the platen top for precision monitoring.

Another significant advancement is the **CMP Wet Application Wafer Sensor**. This invention introduces a semiconductor post-polishing processing apparatus that utilizes a non-optical wafer sensor to detect the presence of a semiconductor wafer at processing stations. Key features include a wet processing station, a wafer transport track, and a transducer-based sensor, usually a piezo element. This sensor emits and detects sound waves that reflect back to the emitter, signaling the presence of a wafer. The system is designed to circumvent issues caused by slurry, residue, or other complications found in damp environments, ensuring efficient and effective wafer handling.

Career Highlights

Charles A. McKinney is currently associated with the International Business Machines Corporation (IBM), where he applies his innovative mindset to develop groundbreaking technologies in semiconductor processing.

Collaborations

Throughout his career, McKinney has collaborated with talented colleagues, including Richard John Lebel and Daniel D. Desorcie. Their combined expertise fosters an environment of mutual growth and innovation, pushing the boundaries of what is possible within their field.

Conclusion

Charles A. McKinney stands out as an influential inventor with a focus on advancing semiconductor processing technologies. His patents not only demonstrate his technical acumen but also highlight his commitment to solving real-world challenges in the industry. As he continues to innovate, McKinney's contributions will undoubtedly shape the future landscape of semiconductor manufacturing.