Changsoon Lim

Title: Changsoon Lim: Semiconductor Process Monitoring Innovation.

Introduction

Changsoon Lim is an inventor based in Suwon-si, South Korea, associated with Samsung Electronics Ltd. His listed patent concerns optical monitoring and arc detection inside semiconductor processing equipment.

Latest Patents

Lim is credited with 1 patent: “Semiconductor Process Device Having an Optical System on a Window.” The invention describes a chamber with multiple electrostatic chucks and two optical systems positioned at different locations on a chamber window. Optical pickup units transmit signals from the chamber to photodetectors, which convert them into electrical signals. A processor uses those signals to create a spatial image of the chamber interior and determine where an arc occurs.

Career Highlights

The patent reflects work on semiconductor process equipment and optical sensing. By locating arcs within a chamber, the described system is designed to provide spatial information that can support process monitoring and equipment diagnostics.

Collaborations

Chansoo Kang and Daewon Kang are identified as Lim’s coworkers. The available information does not specify their roles in the patent or the nature of their collaboration.

Conclusion

Changsoon Lim’s listed patent combines optical sensing, image generation, and arc localization for semiconductor process equipment, highlighting an innovation associated with his work at Samsung Electronics Ltd.