Company Filing History:
Years Active: 2000-2001
Title: Changfeng Xia: Innovator in Semiconductor Technology
Introduction
Changfeng Xia is a prominent inventor based in Plano, TX, known for his contributions to semiconductor technology. With a total of 4 patents, he has made significant advancements in the field, particularly in the area of thin film deposition and thermal diffusion processes.
Latest Patents
One of his latest patents is titled "Fast deposition on spherical-shaped integrated circuits in non-contact CVD process." This invention describes an apparatus and method for depositing thin films on the surface of spherical-shaped devices. The apparatus includes an enclosure with multiple apertures and a conductor coil, allowing for the input and output of devices while injecting and releasing various gases and processing constituents. The devices are preheated before entering a chamber where chemical precursors are added, and further heating occurs through radio frequency energy from the conductor coil, resulting in the growth of a thin film on the device's surface.
Another notable patent is "High temperature plasma-assisted diffusion." This invention provides an apparatus and method for performing thermal diffusion on the substrate of spherical-shaped semiconductors. It features an enclosure with apertures and a plasma chamber, incorporating a plasma generator that produces a plasma torch. The process involves injecting processing fluids into the plasma chamber, where a doping material is ionized to form a high-density diffusion plasma, facilitating quick and uniform diffusion into the semiconductor substrate.
Career Highlights
Changfeng Xia is currently employed at Ball Semiconductor Corporation, where he continues to innovate and develop new technologies in the semiconductor industry. His work has significantly impacted the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
He collaborates with notable colleagues such as Yanwei Zhang and Lixin Wu, contributing to a dynamic and innovative work environment.
Conclusion
Changfeng Xia's contributions to semiconductor technology through his patents and work at Ball Semiconductor Corporation highlight his role as a leading inventor in the field. His innovative approaches to thin film deposition and thermal diffusion processes are paving the way for advancements in semiconductor manufacturing.