Location History:
- Seoul, KR (1993)
- Suwon, KR (2000 - 2003)
Company Filing History:
Years Active: 1993-2003
Title: Chang-lyong Song: Innovator in Semiconductor Technology
Introduction
Chang-lyong Song is a prominent inventor based in Suwon, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on innovative methods that enhance the manufacturing processes of semiconductor devices.
Latest Patents
One of his latest patents is a method of filling a contact hole of a semiconductor device. This method involves a dry cleaning process to remove a damaged layer resulting from dry etching. The process includes selectively exposing an underlying material layer and passing plasma excited from a source gas over it to eliminate the damaged layer. Following this, an electrically conductive layer is formed to fill the contact hole, ensuring that the exposed underlying material is not contaminated.
Another notable patent is for manufacturing a cylindrical storage electrode of a semiconductor device. This method begins with forming a contact pad connected to an active region of a semiconductor substrate. A silicon nitride layer is then created as an etching stop layer, followed by the formation of an insulating layer. The process includes exposing a portion of the silicon nitride layer and removing it through a wet etching process. Ultimately, a cylindrical storage electrode is completed by removing the upper portions of the conductive layer, insulating layer, and silicon nitride layer.
Career Highlights
Chang-lyong Song is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate in semiconductor technology. His expertise and contributions have positioned him as a key figure in the industry.
Collaborations
He has collaborated with notable coworkers, including Yong-Sun Ko and Kyu-hwan Chang, further enhancing the innovative efforts at Samsung Electronics.
Conclusion
Chang-lyong Song's work in semiconductor technology exemplifies the spirit of innovation. His patents reflect a commitment to advancing manufacturing processes, making significant impacts in the field.