Chang-Chun Yeh

Title: Chang-Chun Yeh: Innovator in Semiconductor Process Inspection

Introduction

Chang-Chun Yeh is a notable inventor based in Miaoli, Taiwan, known for his significant contributions to the field of semiconductor technology. With a total of three patents to his name, Yeh has developed innovative methods and devices that enhance the efficiency and accuracy of semiconductor manufacturing processes.

Latest Patents

Chang-Chun Yeh's recent patents reflect his expertise in defect inspection and process monitoring within the semiconductor industry. His first patent, titled "Test device for defect inspection," introduces a sophisticated structure featuring a scanning pad that is analyzed by an electron beam inspection tool. This innovative structure, which can be strategically placed in the scribe line, includes a virtual grounding pad located in the dummy pattern regions when the test key is positioned there.

The second patent, "Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing," outlines a novel approach for monitoring the etching processes of via and contact holes. This method utilizes a test structure comprising via and contact holes of varied sizes and densities. By applying a scanning electron microscope, the process can distinguish etching discrepancies in voltage contrast images, ultimately converting these images into a 'fingerprint' that characterizes the etching process. This technology proves critical in ensuring process uniformity and enhancing long-term process parameter stability.

Career Highlights

Throughout his career, Chang-Chun Yeh has established himself as a prominent figure at Hermes Microvision Inc., where he has been instrumental in pioneering advancements in semiconductor inspection technologies. His work not only emphasizes the importance of precision in manufacturing but also enhances overall yield and efficiency across the production landscape.

Collaborations

Yeh collaborates with talented colleagues such as Yan Zhao and Zhong-wei Chen, who share his passion for innovation in semiconductor processes. Together, they contribute to the development of cutting-edge technologies that push the boundaries of what is possible within the industry.

Conclusion

In summary, Chang-Chun Yeh is a distinguished inventor whose work in the field of semiconductor technology underscores his commitment to innovation. With his latest patents focusing on defect inspection and process monitoring, Yeh continues to influence the industry, ensuring higher quality and efficiency in semiconductor manufacturing. His collaborative efforts further highlight the importance of teamwork in advancing technology.