Location History:
- Kyungki-do, KR (1998)
- Suwon, KR (2000 - 2005)
Company Filing History:
Years Active: 1998-2005
Title: Innovations of Chan-hee Han in Semiconductor Manufacturing
Introduction
Chan-hee Han is a prominent inventor based in Suwon, South Korea. He has made significant contributions to the field of semiconductor manufacturing, holding a total of five patents. His work focuses on advanced methods for producing semiconductor devices, particularly those involving hemispherical grains.
Latest Patents
Among his latest patents is a method for manufacturing a semiconductor device that utilizes hemispherical grains at very low atmospheric pressure. This innovative approach employs first, second, and third vacuum pumps to create an optimal environment for the formation of a HSG silicon layer on a capacitor lower electrode of a semiconductor memory device. The apparatus designed for this process includes a processing chamber equipped with multiple source gas supply nozzles, each varying in length to ensure uniform gas distribution. Additionally, a loadlock chamber is strategically placed beneath the processing chamber to facilitate the movement of wafers, which are rotated during gas supply to enhance the manufacturing process.
Career Highlights
Chan-hee Han is currently employed at Samsung Electronics Co., Ltd., a leading company in the technology sector. His role involves pioneering research and development in semiconductor technologies, contributing to the company's reputation for innovation and excellence in the industry.
Collaborations
Throughout his career, Chan-hee Han has collaborated with notable colleagues, including Chang-jip Yang and Young-Kyou Park. These partnerships have fostered a collaborative environment that encourages the exchange of ideas and advancements in semiconductor technology.
Conclusion
Chan-hee Han's contributions to semiconductor manufacturing exemplify the spirit of innovation in the technology sector. His patents reflect a commitment to advancing the field and improving manufacturing processes. His work continues to influence the development of semiconductor devices, showcasing the importance of research and collaboration in driving technological progress.