Company Filing History:
Years Active: 2012-2025
Title: Innovations by Chae Lyoung Kim
Introduction
Chae Lyoung Kim is a notable inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of substrate polishing technology, holding three patents that showcase his innovative approach to improving semiconductor manufacturing processes.
Latest Patents
Kim's latest patents include a substrate polishing apparatus, a substrate polishing system that incorporates this apparatus, and a substrate polishing method utilizing the same technology. The substrate polishing apparatus features an electric field applying module and a platen designed to rotate a polishing pad. The electric field applying module consists of an inner electrode with a circular shape when viewed from above. The platen is positioned on the inner electrode, with the central axis of the inner electrode offset from that of the platen. Additionally, the inner electrode comprises a first electrode surrounded by a second electrode, forming an annular shape.
Another significant patent involves a cleaning apparatus designed to remove particles from a substrate. This cleaning apparatus includes a first cleaning unit with a dual nozzle that supplies a first chemical liquid and a spray that dissolves this liquid. It also features a second cleaning unit with a second dual nozzle that provides a different chemical liquid and a corresponding spray that dissolves it, ensuring effective cleaning after chemical mechanical polishing.
Career Highlights
Chae Lyoung Kim is currently employed at Samsung Electronics Co., Ltd., where he continues to develop innovative solutions in the semiconductor industry. His work has been instrumental in enhancing the efficiency and effectiveness of substrate polishing processes.
Collaborations
Kim collaborates with talented colleagues, including Boun Yoon and Jongwon Lee, who contribute to the advancement of technology in their field.
Conclusion
Chae Lyoung Kim's contributions to substrate polishing technology reflect his dedication to innovation and excellence in the semiconductor industry. His patents not only demonstrate his technical expertise but also pave the way for advancements in manufacturing processes.