Cha-won Koh

Title: Cha-won Koh: Innovator in Semiconductor Technology

Introduction

Cha-won Koh is a prominent inventor based in Yogin, South Korea. He has made significant contributions to the field of semiconductor technology, particularly in the development of methods for forming hard masks and fine patterns in semiconductor devices. With a total of 2 patents, his work is recognized for its innovative approaches and practical applications.

Latest Patents

Cha-won Koh's latest patents include a method of forming a hard mask and a method of forming a fine pattern of a semiconductor device using the same. This method employs a double patterning technique, where a first hard mask layer is formed on a substrate. A first sacrificial pattern is created on this layer through photolithography, with features spaced apart by a first pitch. Subsequently, a second hard mask layer is formed conformally on both the first sacrificial pattern and the first hard mask layer, delineating recesses between adjacent features. The upper portions of the second hard mask layer are then removed to expose the first sacrificial pattern, which is subsequently removed along with the second sacrificial pattern. Finally, both hard mask layers are etched to create a hard mask composed of the residual portions, allowing for the formation of fine patterns in semiconductor devices, such as trench isolation regions or contact holes.

Career Highlights

Cha-won Koh is currently employed at Samsung Electronics Co., Ltd., where he continues to push the boundaries of semiconductor technology. His innovative methods have the potential to enhance the efficiency and performance of semiconductor devices, making significant impacts in the industry.

Collaborations

Cha-won Koh collaborates with talented coworkers, including Ji-young Lee and Jeong-lim Nam. Their combined expertise contributes to the advancement of semiconductor technologies and the successful implementation of innovative solutions.

Conclusion

Cha-won Koh is a key figure in the semiconductor industry, known for his innovative patents and contributions to technology. His work at Samsung Electronics Co., Ltd. exemplifies the importance of collaboration and innovation in driving advancements in semiconductor manufacturing.