Dresden, Germany

Carsten Goergens

This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Aviza Europe Limited. Active years: 2008.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Carsten Goergens. Retrieved from https://idiyas.com/inventor/carsten-goergens

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 1 

% Patents Active = 100.0

Average Co-Inventor Count = 2.0

ph-index = 1

Forward Citations = 3(Granted Patents)


Company Filing History:


Years Active: 2008

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1 patent (USPTO):Explore Patents

Title: Carsten Goergens: Innovator in Magnetron Sputtering Technology

Introduction

Carsten Goergens is a notable inventor based in Dresden, Germany. He has made significant contributions to the field of magnetron sputtering technology, which is essential in various applications, including semiconductor manufacturing.

Latest Patents

Carsten Goergens holds a patent for a magnetron sputtering apparatus. This innovative device features a controller that selectively manages the spread of plasma on a substrate supported during the coating process. The controller also has the capability to contain the plasma when the substrate is being coated with the target material. This design allows for the cleaning of the target surface during intervals between the deposition of target material onto a desired substrate, such as a wafer. It ensures that layers or flakes of back-scattered deposited target material do not accumulate on the target itself. Additionally, a platen coil is strategically positioned between the magnetron and the support to enhance both the uniformity and density of the target material arriving nearly normal to the substrate surface. Carsten's patent is a testament to his innovative approach in this technical field, with 1 patent to his name.

Career Highlights

Carsten Goergens is currently associated with Aviza Europe Limited, where he continues to develop and refine technologies related to magnetron sputtering. His work has been instrumental in advancing the efficiency and effectiveness of coating processes in various industrial applications.

Collaborations

Carsten has collaborated with Stephen Robert Burgess, contributing to the development of innovative solutions in their field. Their partnership has fostered advancements in technology and has led to the successful implementation of new ideas.

Conclusion

Carsten Goergens is a distinguished inventor whose work in magnetron sputtering technology has made a significant impact in the industry. His innovative patent and ongoing contributions continue to shape the future of coating technologies.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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