This inventor holds 1 USPTO granted patent. Top assignee: Amosense Co., Ltd. Active years: 2025.
Company Filing History:
Years Active: 2025
Title: Byoungsu Jin: Innovator in Electrostatic Chuck Technology
Introduction
Byoungsu Jin is a prominent inventor based in Cheonan, South Korea. He has made significant contributions to the field of electrostatic chuck technology, which is essential for various applications in semiconductor manufacturing.
Latest Patents
Byoungsu Jin holds a patent for an "Electrostatic chuck sheet and electrostatic chuck comprising same." This invention discloses an electrostatic chuck sheet that is utilized for chucking a substrate using electrostatic force. The design includes a first dielectric layer made of a polymer material, a first electrode layer with conductive metal first electrodes, a second electrode layer with conductive metal second electrodes, an interlayer dielectric layer of polymer material, and a protective layer also made of polymer material. Notably, the first and second electrodes are arranged to avoid overlapping in the direction perpendicular to the electrostatic chuck sheet. This innovative design enhances the efficiency and effectiveness of electrostatic chucks in various applications.
Career Highlights
Byoungsu Jin is currently employed at Amosense Co., Ltd., where he continues to develop cutting-edge technologies in his field. His work has garnered attention for its practical applications and innovative approaches to existing challenges in semiconductor manufacturing.
Collaborations
Throughout his career, Byoungsu Jin has collaborated with talented individuals such as Jihyung Lee and Sungbaek Dan. These collaborations have contributed to the advancement of technology in their respective fields.
Conclusion
Byoungsu Jin is a notable inventor whose work in electrostatic chuck technology has made a significant impact in the semiconductor industry. His innovative patent and ongoing contributions at Amosense Co., Ltd. highlight his dedication to advancing technology.