This inventor holds 2 USPTO granted patents. Top assignee: Fairchild Semiconductor Corporation. Active years: 1987-1988.
Company Filing History:
Years Active: 1987-1988
Title: Innovations by Bruce R. Cairns
Introduction
Bruce R. Cairns is a notable inventor based in Los Altos Hills, California. He has made significant contributions to the field of semiconductor technology, particularly through his innovative patents. With a total of two patents to his name, Cairns has demonstrated a commitment to advancing the capabilities of silicon substrates.
Latest Patents
Cairns' latest patents include a low-temperature plasma nitridation process and applications of nitride. In this process, a silicon nitride layer is prepared on the surface of a silicon substrate by conducting a surface reaction in a vacuum chamber. This chamber contains an electrode that is capacitively coupled to an RF generator. A second electrode or the metal wall of the chamber is grounded. The silicon substrates are placed on one of the electrodes, ensuring electrical and physical contact. A reagent gas containing nitrogen is introduced into the chamber, and an RF voltage is applied to ionize and activate the gas. This results in nitrogen ions and other active species being directed into the silicon substrate. The thin nitride films formed by this process serve as barriers for device isolation and as dielectric components in electrical devices. Additionally, he has developed a deposition reactor system for producing coatings containing predetermined components on substrates from a plasma in an ionized state.
Career Highlights
Cairns is associated with Fairchild Semiconductor Corporation, where he has contributed to various projects and innovations. His work has been instrumental in enhancing semiconductor manufacturing processes and improving device performance.
Collaborations
Cairns has collaborated with notable colleagues such as Thomas Keyser and Kranti V. Anand. These collaborations have further enriched his work and contributed to advancements in semiconductor technology.
Conclusion
Bruce R. Cairns is a distinguished inventor whose work in semiconductor technology has led to significant innovations. His patents reflect a deep understanding of materials and processes that enhance the functionality of electronic devices.