This inventor holds 3 USPTO granted patents. Top assignee: Lam Research Corporation. Active years: 2019-2022.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2019-2022
Title: Innovations by Brian Severson
Introduction
Brian Severson is an accomplished inventor based in Queen Creek, AZ (US). He has made significant contributions to the field of substrate support technology, holding a total of 3 patents. His work focuses on enhancing etch uniformity control, which is crucial in various manufacturing processes.
Latest Patents
One of Brian's latest patents is titled "Variable depth edge ring for etch uniformity control." This invention describes a method of operating a substrate support that involves arranging a substrate on an inner portion of the support. The process includes calculating a desired pocket depth based on data that indicates the relationship between the pocket depth and at least one process parameter. The desired pocket depth corresponds to the distance between the upper surface of an edge ring and the upper surface of the substrate. The method allows for selective control of an actuator to adjust this distance, thereby improving etch uniformity.
Another patent under the same title also focuses on a substrate support that includes an inner portion for supporting a substrate and an edge ring surrounding it. The controller in this invention calculates the desired pocket depth, which is essential for maintaining the correct distance between the edge ring and the substrate. This innovation further enhances the precision of substrate processing.
Career Highlights
Brian Severson is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His role involves developing advanced technologies that improve manufacturing processes. His expertise in substrate support systems has positioned him as a valuable asset to his team.
Collaborations
Brian has collaborated with notable coworkers such as Ivelin A Angelov and Cristian Siladie. Their combined efforts contribute to the innovative projects at Lam Research Corporation.
Conclusion
Brian Severson's contributions to substrate support technology through his patents demonstrate his commitment to innovation in the semiconductor industry. His work continues to influence the efficiency and effectiveness of manufacturing processes.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile