Brad Jacobs

Title: Innovations by Brad Jacobs in Tungsten Etching Technology

Introduction

Brad Jacobs is an accomplished inventor based in East Helena, Missouri. He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of tungsten etching technology. His innovative approach has led to the development of a patented method that enhances the efficiency of substrate processing.

Latest Patents

Brad Jacobs holds a patent for "Systems and methods for selectively etching tungsten in a downstream reactor." This patent describes a method for selectively etching a tungsten layer on a substrate. The process involves arranging a substrate with a tungsten layer on a substrate support within a substrate processing chamber. The chamber features an upper region, an inductive coil, a lower region with the substrate support, and a gas dispersion device. The method includes controlling the pressure in the chamber, supplying an etch gas mixture, and striking inductively coupled plasma to selectively etch the tungsten layer relative to other film materials.

Career Highlights

Brad Jacobs is currently employed at Lam Research Corporation, a leading company in semiconductor manufacturing equipment. His work focuses on advancing technologies that improve the efficiency and effectiveness of etching processes in the semiconductor industry. His innovative contributions have positioned him as a key player in the field.

Collaborations

Brad has collaborated with notable colleagues, including Dengliang Yang and Helen H Zhu. These collaborations have fostered an environment of innovation and have contributed to the advancement of technologies in the semiconductor sector.

Conclusion

Brad Jacobs is a notable inventor whose work in tungsten etching technology has made a significant impact on the semiconductor industry. His patented methods and collaborations with esteemed colleagues highlight his commitment to innovation and excellence in his field.