Company Filing History:
Years Active: 2019-2025
Title: Bostjan Pust: Innovator in Plasma Tool Technology
Introduction
Bostjan Pust, an esteemed inventor based in San Ramon, California, holds three patents that contribute significantly to advancements in plasma technology and substrate processing systems. His innovative work is particularly recognized for improving efficiency and effectiveness in gas delivery systems.
Latest Patents
Bostjan Pust's recent inventions include two notable patents:
1. **Sensor Data Compression in a Plasma Tool**
This patent describes systems and methods for compressing measurement data received from sensors attached to the radio frequency (RF) transmission path of a plasma tool. The method involves converting measurement signals from analog to digital form for data sampling and processing, resulting in a reduced amount of data that is then compressed and sent to a controller for efficient plasma tool operation.
2. **Software Emulator for Hardware Components in a Gas Delivery System of Substrate Processing System**
In this invention, Pust introduced a software emulation system that integrates with the gas delivery system of a substrate processing system. The setup includes an input/output bus adapter that routes data packets, allowing the gas delivery system emulator to simulate various hardware components, such as a gas source and control valves. This enhances the performance and management of gas delivery in substrate processing.
Career Highlights
Bostjan Pust is currently employed at Lam Research Corporation, an influential company in the semiconductor industry that specializes in wafer fabrication equipment and services. His contributions to the field have garnered attention for their innovative approaches and practical applications in real-world scenarios.
Collaborations
Pust has collaborated with esteemed colleagues, including John C Valcore, Jr. and Tony San, sharing insights and expertise that bolster the advancement of technologies in their field. These partnerships reflect the collaborative spirit essential for driving innovation in complex engineering challenges.
Conclusion
With a proven track record of innovation, Bostjan Pust continues to impact the fields of plasma tool technology and substrate processing systems. His patents not only enhance operational efficiencies but also pave the way for future advancements in the industry. As technology evolves, inventors like Pust will be at the forefront, driving the innovations that shape our world.