Boris V Atlas

Title: Innovations by Boris V. Atlas: A Trailblazer in Electrostatic Chuck Technology

Introduction

Boris V. Atlas, an inventor based in San Jose, CA, has made notable contributions in the field of electrostatic chuck technology with two patents registered under his name. His innovative spirit and engineering expertise have positioned him at the forefront of advancements that enhance wafer handling processes in semiconductor manufacturing.

Latest Patents

Boris's latest patents include:

1. **Negative Offset Bipolar Electrostatic Chucks**

This inventive system features a bipolar electrostatic chuck designed to securely hold a wafer on its surface. The system includes a negative-offset power supply that provides both positive and negative potential levels, with the latter level being more significantly biased than the former. The chuck's positive and negative poles are coupled to this power supply, ensuring optimal biasing when activated.

2. **Dynamic Feedback Electrostatic Wafer Chuck**

This electrostatic chuck system utilizes a wafer bias sensor that detects an alternating current signal at one portion of the chuck. It produces a direct current voltage level indicative of the wafer's bias level. The accompanying variable electrostatic chuck power supply constantly adjusts the potential level to maintain a predefined potential difference between the chuck and the wafer, making it responsive to changes in the direct current bias.

Career Highlights

Boris V. Atlas works at Lam Research Corporation, a key player in the semiconductor manufacturing industry. His tenure at this prestigious company has allowed him to apply his inventive skills and contribute to cutting-edge technologies that shape modern manufacturing processes.

Collaborations

Throughout his career, Boris has collaborated with notable colleagues including Phillip Lawrence Jones and Seyed Jafar Jafarian-Tehrani. These collaborations have fostered an innovative environment, encouraging the exchange of ideas and the development of groundbreaking technologies in their field.

Conclusion

Boris V. Atlas is a pioneering inventor whose work on electrostatic chucks has the potential to significantly impact the semiconductor industry. His patents not only showcase his technical ingenuity but also reflect the collaborative spirit of innovation within Lam Research Corporation. As technology continues to evolve, Boris remains a key figure driving advancements that enhance efficiency and efficacy in wafer handling.