Company Filing History:
Years Active: 1985
Title: Innovations by Boris Meshman in Wafer Stepper Technology
Introduction
Boris Meshman, an esteemed inventor located in Canoga Park, California, has made a significant contribution to the field of semiconductor manufacturing. With one patent to his name, Meshman's innovation focuses on enhancing the efficiency and speed of wafer stepper systems, a critical element in modern electronics.
Latest Patents
Boris Meshman's patent, titled "High Speed Alignment Method for Wafer Stepper," introduces an advanced method designed to facilitate die-by-die alignment at high speeds. This technique increases the throughput of step-and-repeat exposure systems by allowing the wafer to be moved efficiently to a target position. In this process, the alignment target previously formed on the wafer can be viewed, and the system calculates the precise position for exposure. By initiating a video scan of the alignment target early in the stage motion, alignment time at each die site is significantly reduced, showcasing his innovative approach to solving complex engineering problems.
Career Highlights
Meshman is associated with Tre Semiconductor Equipment Corporation, where he applies his expertise to advance semiconductor manufacturing technologies. His contributions to the industry have established him as a key figure in improving the design and efficiency of semiconductor equipment.
Collaborations
Throughout his career, Meshman has collaborated with prominent colleagues, including Thomas A. Kerekes and Lawrence S. Green. These collaborations have fostered an environment of innovation and have further propelled advancements in the semiconductor field.
Conclusion
Boris Meshman's work exemplifies the ongoing innovations in semiconductor technology. His patent on high-speed alignment methods for wafer steppers not only underscores his inventive capabilities but also highlights the importance of efficiency in semiconductor manufacturing. As technology continues to evolve, inventions like Meshman's will undoubtedly play a crucial role in shaping the future of electronics.