Seoul, South Korea

Boo-sup Lee


Average Co-Inventor Count = 6.0

ph-index = 1

Forward Citations = 8(Granted Patents)


Company Filing History:


Years Active: 1999

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1 patent (USPTO):Explore Patents

Title: Innovations of Boo-sup Lee in Semiconductor Manufacturing

Introduction

Boo-sup Lee is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patent that enhances the efficiency of photoresist washing processes.

Latest Patents

Boo-sup Lee holds a patent for a thinner composition used in the washing process for manufacturing semiconductor devices. This composition includes at least ethyl lactate (EL) and ethyl-3-ethoxy propionate (EEP), and preferably, it also contains Gamma-butyrolactone. The thinner composition is characterized by high volatility and low viscosity, which allows for a sufficient solubility rate when rinsing photoresist on the wafer. This innovation effectively removes photoresist from the edge or backside of a wafer at a rapid rate, thereby enhancing the yield of semiconductor devices. Additionally, any remaining photoresist can be completely removed, enabling the reuse of the wafer and resulting in economic benefits.

Career Highlights

Boo-sup Lee is associated with Samsung Electronics Co., Ltd., where he continues to contribute to advancements in semiconductor technology. His work has been instrumental in improving manufacturing processes and product quality.

Collaborations

Some of his notable coworkers include Sang-moon Chon and Sung-il Kim, who collaborate with him on various projects within the semiconductor field.

Conclusion

Boo-sup Lee's innovative contributions to semiconductor manufacturing through his patented thinner composition demonstrate his commitment to enhancing production efficiency and economic viability in the industry. His work continues to influence the field positively.

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