Bing Yin

Title: The Innovations of Bing Yin

Introduction

Bing Yin is a notable inventor based in Southborough, MA (US), recognized for his contributions to substrate transport systems. With a total of 6 patents to his name, he has made significant advancements in the field of substrate processing technology.

Latest Patents

Among his latest patents is the "Method and apparatus for substrate transport apparatus position compensation." This invention features a substrate transport empiric arm droop mapping apparatus designed for a processing tool. The mapping apparatus includes a frame and an interface that forms datum features representative of a substrate transport space. It also incorporates a substrate transport arm that is articulated and has a substrate holder, mounted in a predetermined relation to the datum features. Additionally, a registration system is included to register empiric arm droop distance due to changes in arm droop.

Another significant patent is the "On the fly automatic wafer centering method and apparatus." This substrate processing apparatus includes a wafer transport apparatus with a transport arm featuring an end effector. It has an arm pose deterministic feature that allows for the detection of at least one edge of the arm pose on the fly. A controller is configured to determine a proportion factor identifying thermal expansion variance of the transport arm, enhancing the efficiency of substrate processing.

Career Highlights

Bing Yin has worked with reputable companies such as Brooks Automation GmbH and Brooks Automation US, LLC. His experience in these organizations has contributed to his expertise in substrate transport systems and processing technologies.

Collaborations

Throughout his career, Bing has collaborated with talented individuals, including Jairo Terra Moura and Vincent W. Tsang. These collaborations have fostered innovation and development in the field of substrate processing.

Conclusion

Bing Yin's contributions to substrate transport technology through his patents and collaborations highlight his role as a significant inventor in the industry. His work continues to influence advancements in substrate processing systems.