Company Filing History:
Years Active: 2019-2024
Title: Benny Wu: Innovator in Semiconductor Processing Technologies
Introduction
Benny Wu is a prominent inventor based in Fremont, CA, known for his contributions to semiconductor processing technologies. With a total of 4 patents, he has made significant advancements in the field, particularly in the area of substrate processing systems.
Latest Patents
Benny Wu's latest patents include innovative systems and methods for in situ real-time sensing and compensation of non-uniformities in substrate processing systems. These systems perform in situ sensing to detect plasma non-uniformities by determining temperature distributions across a matrix of micro-heaters. The technology allows for real-time compensation by adjusting various parameters such as power supplied to the heaters and the chemistry of gases used in plasma generation. Another notable patent is for a multi-plane heater designed for semiconductor substrate support. This heater array comprises thermal control elements that can tune the spatial temperature profile on the semiconductor substrate, enhancing the efficiency of plasma processing.
Career Highlights
Benny Wu is currently employed at Lam Research Corporation, where he continues to develop cutting-edge technologies in semiconductor processing. His work has been instrumental in improving the performance and reliability of semiconductor manufacturing processes.
Collaborations
Benny has collaborated with notable colleagues, including Keith William Gaff and Eric A Pape, contributing to a dynamic and innovative work environment.
Conclusion
Benny Wu's contributions to semiconductor processing technologies through his patents and work at Lam Research Corporation highlight his role as a key innovator in the field. His advancements are paving the way for more efficient and effective semiconductor manufacturing processes.
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