Company Filing History:

3 out of 3,768

Lam Research Corporation

patents

Years Active: 2004-2006

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3 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 7099013 - System and method of broad band optical end point detection for film change indication (2006-08-29),

2. 6876455 - Method and apparatus for broadband optical end point determination for in-situ film thickness measurement (2005-04-05),

3. 6806948 - System and method of broad band optical end point detection for film change indication (2004-10-19),

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For the Inventor, By the Inventor

Bella Mitchell

Location History:

Company Filing History:

Years Active: 2004-2006