This inventor holds 2 USPTO granted patents. Top assignee: Applied Materials, Inc.. Active years: 2000-2001.
Company Filing History:
Years Active: 2000-2001
Title: Innovations by Behzad Shamlou in Semiconductor Technology
Introduction
Behzad Shamlou is a notable inventor based in San Jose, CA, who has made significant contributions to the field of semiconductor technology. With a total of 2 patents, his work focuses on improving the efficiency and effectiveness of robotic systems used in semiconductor manufacturing.
Latest Patents
One of his latest patents is for a robot blade designed for the handling of semiconductor substrates. This innovation addresses the issue of particulate contamination that occurs due to friction between the semiconductor substrate and the robotic handling blade. By utilizing specialized materials, either as the primary construction material or as a coating, the amount of contamination has been significantly reduced. The materials used must maintain desired stiffness at temperatures exceeding 450°C and possess an abrasion-resistant surface that does not generate particulates. The surface finish of the blade is crucial, requiring a smoothness of less than 1.0 micro inch, and ideally less than 0.2 micro inch, while also being essentially void-free. The preferred construction material for the blade is single crystal sapphire, although other single crystal materials like silicon and silicon carbide are also effective. Additionally, the design incorporates a capacitance sensor to detect the presence of a semiconductor substrate and a vacuum structure to securely hold the substrate in place.
Career Highlights
Behzad Shamlou is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work at Applied Materials has allowed him to develop cutting-edge technologies that enhance the manufacturing processes of semiconductors.
Collaborations
Throughout his career, Behzad has collaborated with talented individuals such as Yu Wen Chang and Daniel O Clark. These collaborations have contributed to the advancement of innovative solutions in semiconductor technology.
Conclusion
Behzad Shamlou's contributions to semiconductor technology through his patents and work at Applied Materials, Inc. highlight his role as a key innovator in the field. His advancements in robotic handling systems are paving the way for more efficient semiconductor manufacturing processes.