Balasubramaniam Coimbatore Jaganathan

Title: Innovations by Balasubramaniam Coimbatore Jaganathan

Introduction

Balasubramaniam Coimbatore Jaganathan is a notable inventor based in Santa Clara, CA (US). He has made significant contributions to the field of semiconductor device manufacturing. With a total of 3 patents to his name, Jaganathan continues to push the boundaries of innovation in his industry.

Latest Patents

One of his latest patents is the Non-contact clean module. This cleaning module is designed for cleaning wafers and includes a wafer gripping device that supports the wafer in a vertical orientation. The device features a catch cup with an annular inner surface that defines a processing region and an angled portion symmetric about the central axis. The gripper assembly consists of a first plate assembly, a second plate assembly, gripping pins, and loading pins. The gripping pins are used to hold the wafer during the cleaning process, while the loading pins assist in loading and unloading the wafer. Additionally, the cleaning module is equipped with a sweep arm connected to a nozzle mechanism for delivering liquids to both sides of the wafer.

Another significant patent is related to substrate handling systems. This apparatus is designed for transferring substrates in semiconductor device manufacturing. It features a substrate handler with enclosed moving elements, enhancing compatibility with post-CMP cleaning modules. The apparatus includes one or more indexing assemblies, each containing an enclosure, an actuator assembly, and two handling blades that can move in either a translational or rotating manner.

Career Highlights

Balasubramaniam Jaganathan is currently employed at Applied Materials, Inc., where he applies his expertise in semiconductor technology. His work has been instrumental in developing advanced systems that improve efficiency and effectiveness in semiconductor manufacturing processes.

Collaborations

Throughout his career, Jaganathan has collaborated with notable colleagues, including Jagan Rangarajan and Adrian Blank. These collaborations have contributed to the successful development of innovative technologies in the semiconductor field.

Conclusion

Balasubramaniam Coimbatore Jaganathan is a distinguished inventor whose work in semiconductor technology has led to several important patents. His contributions continue to shape the future of the industry, demonstrating the impact of innovation on technology.