13 Utility Patents
#81 in Aalen
#16,442 in Germany
#297,277 in the World
Forward Citations = 117
Company Filing History:
Carl-zeiss-smt Ag

Other
4. 1 out of 1,405

5. 1 out of 2
Asml Lithography B.v.
where one patent can have more than one assignee
Get your Inventor Badge Today