Carl-zeiss-smt Ag

Carl-zeiss-stiftung

Other

Carl Zeiss Smt Gmbh

Asml Lithography B.v.

Carl Zeiss Laser Optics Gmbh

Wilhelm Egle

Wolfgang Singer

Johannes Wangler

Frank Melzer

Markus Weiss

Joachim Hainz

Martin Antoni

Bernhard Gellrich

Bernhard Geuppert

Jochen Wietzorrek

Holger Muenz

Ulrich Bingel

Willi Anderl

Erich Schubert

Joachim Wietzorrek

Thomas Neidhardt

Wolfgang Hafner

Erik Roelof Loopstra

Vadim Yevgenyevich Banine

Andreas Seifert

Dietrich Hoffmeister

Albrecht Rilk

Hartmut Rosner

Ernst Gutter

F Peter Ottensmeyer

Holger Münz

An optical component comprises at least one optically effective optical element which heats up when irradiated with light, and at least one holding element for the at least one optical element for holding the at least one optical element in a carrier structure, wherein the at least one optical element is connected to the at least one holding element in heat conducting fashion, and wherein the at least one holding element is at least partially provided with an active cooling system for carrying off heat from the at least one optical element. Additionally or alternatively, a temperature control device is provided which controls the temperature of at least a part of the mount of the optical element.

Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component

There is provided a collector. The collector includes a first mirror shell positioned inside a second mirror shell that has a chamfered end.

Collector configured of mirror shells

A focusing-device for the radiation from a light source () is provided with a collector mirror (') which is arranged in a mount () and collects the light, in virtual or real terms, from the light source () at the second focus (). The collector mirror (&#x2032;) is displaceably connected to the mount () via a bearing in such a way that its optical properties remain at least approximately the same even in the event of temperature changes.

Focusing-device for the radiation from a light source

There is provided a projection exposure system operable in a scanning mode along a scanning direction. The projection exposure system includes a collector that receives light having a wavelength &#x2266;193 nm and illuminates a region in a plane. The plane is defined by a local coordinate system having a y-direction parallel to the scanning direction and an x-direction perpendicular to the scanning direction. The collector includes (a) a first mirror shell, (b) a second mirror shell within the first mirror shell, and (c) a fastening device for fastening the first and second mirror shells. The mirror shells are substantially rotational symmetric about a common rotational axis. The fastening device has a support spoke that extends in a radial direction of the mirror shells, and the support spoke, when projected into the plane, yields a projection that is non-parallel to the y-direction.

Collector with fastening devices for fastening mirror shells

There is provided a collector for illumination systems for light having a wavelength &#x2266;193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.

Collector having unused region for illumination systems using a wavelength &#x2266;193 nm

Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm

There is provided an illumination system for wavelengths of &#x2266;193 nm. The illumination system includes an object plane, a plane conjugated to the object plane, a first collector between the object plane and the conjugated plane, and a second collector after the conjugated plane. The first collector focuses a beam bundle of rays from the object plane in the conjugated plane. At least one of the first and second collectors includes a mirror shell. The rays strike the mirror shell at an angle of incidence of less than 20&#xb0; relative to a surface tangent of the mirror shell.

Illumination system that suppresses debris from a light source

A transmission electron microscope is disclosed, having an electron-energy spectrometer, a first imaging stage of four electron lenses in front of the spectrometer, and a second imaging stage of two more electron lenses following the spectrometer. The parts are so arranged, according to the disclosed structure, and so operated, according to the disclosed method, that a large range of magnifications can be obtained while the object or specimen to be examined remains in a fixed location, without having to refocus when the magnification is changed. The change in magnification occurs by changing the operation of the first imaging stage. The second imaging stage operates at a substantially fixed magnification, its magnification being changed, if at all, only to accommodate the size of the output image from the second stage to size of the available working area of the detector in the final image plane (fluorescent screen, photographic film, or electronic detector). The first stage, at all magnifications, always images the object or an image of a diffraction pattern of the object into the input image plane of the spectrometer and an image of the electron source into the input crossover plane of the spectrometer. The spectrometer is of the prism-mirror-prism type, and improved results are obtained by making the entrance and exit surfaces of the prism curved rather than planar.

Imaging method and apparatus for electron microscopes

A goniometer stage has a tilting axis which can be adjusted to the point of intersection of the optical axis of the objective lens with the focusing plane. A bearing sleeve for a specimen holder rod is seated with its inner end in a ball-like inner bearing and is connected on its outer end with a cylinder of the tilting device via decoupled positioning devices. The rotational movement of the tilting device is transmitted directly, via a metal bellows from the cylinder to the bearing sleeve.

Goniometer stage

The invention contemplates lead-through structure for the high-voltage electrode of an electron microscope or the like, in conjunction with shaping of the high-voltage electrode and of the body of insulating material via which the lead-through is supported, in reference to metal envelope structure. The high-voltage electrode has a step-wise enlargement, and the surface of the insulating material which is exposed to the vacuum commences at the start of the step-wise enlargement. As a result, the field strength along the vacuum-exposed insulator surface is so influenced that a minimum electric field strength is produced at the boundary line between the vacuum and the high-voltage electrode. The further result is to prevent occurrence of microdischarges.

High voltage lead-through

The invention contemplates method and means for using an electron microscope in conjunction with a projection system whereby the microscope produces a distortion-corrected image of an object at a relatively low magnification level, the distortion-corrected image being at the object plane of the projection system, whereby magnification may be varied in accordance with excitation of the projection system, and whereby a delicate object specimen may be fixedly positioned and exposed to large-area low-level illuminating flux within the objective lens system of the microscope.

Electron microscope or the like and method of use

Growing community of inventors

Aalen, Germany

Wilhelm Egle