13 Utility Patents
#85 in Jena
#16,141 in Germany
#291,352 in the World
Forward Citations = 88
Company Filing History:

Vistec Electron Beam Gmbh
Friedrich-schiller-universität Jena
4. 2 out of 20
Leica Microsystems Lithography Gmbh
5. 1 out of 81

where one patent can have more than one assignee
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