Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Vistec Electron Beam Gmbh

Friedrich-schiller-universitat Jena

Leica Microsystems Lithography Gmbh

Jenavalve Technology Gmbh

Leica Microststems Lithography Gmbh

Stefan Risse

Christoph Damm

Thomas Peschel

Ulf-Carsten Kirschstein

Gerhard Schubert

Gerd Harnisch

Christoph Schenk

Gerhard Kalkowski

Andreas Gebhardt

Christian Jackel

Michael Boehm

René Bauer

Volker Guyenot

Sebastian Scheiding

Hans-Reiner Figulla

Markus Ferrari

Thomas Elster

Ramona Eberhardt

Hans-Joachim Doering

Carsten Weber

Ralf Steinkopf

Peggy Dörrer

Britta Satzer

Jan Kinast

Mathias Rohde

Klaus Lang

Matthias Mohaupt

Wieland Stöckl

Matthias Beier

Johannes Hartung

Michael Scheiding

Daniela Stumpf

Uwe D Zeitner

Michael Böhm

A mirror support for an optical mirror and a method for producing an optical mirror are disclosed. In an embodiment a mirror support includes a mirror body comprising a diamond particle reinforced aluminum composite material and a polishing layer arranged on the mirror body, wherein a content of diamond particles in the aluminum composite material is between 5% by mass and 50% by mass inclusive and is selected such that a thermal coefficient of linear expansion of the mirror body is adapted to a thermal coefficient of linear expansion of the polishing layer.

Mirror support for a composite optical mirror and method for its production

A method and a device for producing an optical component having at least three monolithically arranged optical functional surfaces and an optical component are disclosed. The method includes calculating a continuous surface composite, which includes the first optical functional surface and the second optical functional surface, producing the continuous surface composite, which contains the first and second optical functional surfaces in a defined shape and a relative position to one another, on the first side of the optical component through machining by a machine tool, producing at least one reference surface arranged outside the optical functional surfaces on the optical component or on a mount and having a defined positional relation to the optical functional surfaces through machining by the machine tool and repositioning the optical component in such a way that the second side of the optical component is machined with the machine tool, wherein the at least one reference surface serves as a contact surface or mounting surface.

Method and device for producing an optical component having at least three monolithically arranged optical functional surfaces and optical component

The invention relates to a method for manufacturing a light weight optical mirror or a monolithic mirror comprising at least one cooling channel, the method comprising forming a mirror body by iteratively depositing a metallic powder in layers and applying, for each of the layers, heat at least in a subarea of this layer, thereby fusing or sintering the powder in this subarea and bonding it to a previously deposited layer, the powder remaining in an unfused state in at least one region, the method further comprising forming at least one cavity within the carrier by removing the unfused powder from said region and producing a mirror surface at a closed surface of the mirror body. The invention further relates to an optical mirror and to an optical device.

Method for manufacturing a mirror comprising at least one cavity and optical mirror

The invention relates to a method of producing lightweight structural elements which are produced as a composition construction element having at least one cover plate and one carrier element which are connected to one another. A carrier element, at which at least one apertures and/or at least one cut-out is/are formed and at least one further element, which is a cover plate, are connected to one another. A carrier element and at least one cover plate can be formed from a glass, a glass ceramic material, a ceramic material and/or silicon having an oxide surface layer which is formed at least in the bonding region of the elements to be connected to one another. The carrier element should have at least a double thickness with respect to the thickness of a cover plate. The surfaces of the cover plate(s) and of the carrier element to be connected to one another should be intensely cleaned in their bonding regions and should be smoothed such that a roughness of the surface is achieved there, such that they are in direct touching contact with at least 80% of their bonding surface with an active compression source and in this respect a thermal treatment is carried out at a temperature of at least 100&#xb0; C. and maintaining of the temperature over a period of at least 0.5 h to establish a bond connection of the cover plate(s) and the carrier element. In this respect, at least one cover plate should be connected to a surface of the carrier element at which at least one opening of an aperture or of a cut-out is arranged.

Method of producing lightweight structural elements

The invention relates to a method for producing an optical assembly, comprising at least two optical functional surfaces arranged in a fixed positional relationship to one another on a common supporting structure, wherein by means of a processing machine, in various process steps, at least two optical functional surfaces and at least one reference structure having a defined and measurable relative position to the optical functional surfaces are produced. The supporting structure remains rigidly connected to the processing machine until said process steps have been completed, and wherein the optical functional surfaces are then measured relative to the at least one reference structure, and any deviation from a target shape and target position is determined, after which said process steps are repeated at least once with modified actuation of the processing machine. The invention further relates to an optical device comprising an optical assembly produced in this way and to a unit for carrying out such a method.

Method for producing an optical assembly having at least two optical functional surfaces, an optical device and unit for carrying out the method

A proposed aerostatic bearing arrangement for moving a device on a base structure, particularly in a vacuum environment, has at least one aerostatic bearing element comprising a bearing body having a load-carrying zone and a suction area. An electrostatic preloading unit having at least one electrode is associated with the at least one aerostatic bearing element, and a voltage can be applied to the electrode in such a way that a force component is generated in direction of the surface normal of the bearing body of the aerostatic bearing element.

Aerostatic bearing arrangement and associated electrostatic preloading unit, particularly for vacuum application

A table system for vacuum application has a base plate and a moving table guided by aerostatic bearing units. The bearing units () are connected to supply lines and suction lines for supplying and extracting the gas required for the operation of the bearing units and are provided in each instance with a sealing system having at least one stage and comprising suction channel and sealing gap for sealing relative to the vacuum. The table system is characterized in that the aerostatic bearing units () are constructed at least partially as swivel joints, and a push rod () which is actuated by a drive () for guiding the moving table laterally is connected to the rotating part () of each swivel joint, and in that the push rods () are hollow and constitute a component part of the suction lines for extracting the operating gas.

Aerostatically guided table system for vacuum application

Flexibly deformable holding elements operate such that substrates can be held in a fixed manner at a surface of the holding element electrostatically or also by use of negative pressure and planar positional deviations or unwanted deformations can be compensated simply and reliably, where at least one cut-out having an opening arranged at the rear side is formed at the rear side of the holding element which is disposed opposite the surface, and an actuator is arranged there exerting compressive forces or pulling forces for a widening or narrowing of the cut-out and/or for a deformation of the holding element.

Flexibly deformable holding element for substrates

A table for vacuum application which is guided by aerostatic bearing elements, having a fixedly mounted supporting structure and a tabletop which is displaceable in x-direction and y-direction with respect to the fixedly mounted supporting structure by means of slides. The slides are provided with the aerostatic bearing elements for guiding, these aerostatic bearing elements being connected to feed lines for supplying the gas required for the operation of the gas bearings and suction lines for removing this gas. The suction lines comprise at least one variable-length line arrangement having a first pipe member and a second pipe member which penetrate one inside the other without contacting, at least one sealing gap being provided between the pipe members.

Table guided by aerostatic bearing elements for vacuum application

The invention relates to an anchoring system for heart valve prostheses which can be implanted by introduction via the aorta without any major surgical operation. With the heart valve prosthesis according to the invention it shall be achieved that this can be safely and quickly guided through the aorta toward the heart, and can be fixed there. With this, hook-shaped elements are secured to the commissures of the heart valve prosthesis the hooks of which are guided in an outward direction through the heart valve prosthesis material.

Anchoring system for implantable heart valve prostheses

The invention is directed to electrostatic deflection systems for corpuscular beams which can be used particularly in microstructured and nanostructured applications in lithography installations or measuring equipment. According to the proposed object of the invention, the individual electrodes of a deflection system of this kind should permanently have and retain a very exact axially symmetric arrangement relative to one another. In the electrostatic deflection system according to the invention, rod-shaped electrodes are held in an axially symmetric arrangement in an inwardly hollow carrier through which a corpuscular beam can be directed. The carrier is formed of at least two, and at most four, carrier members which are connected to one another.

Electrostatic deflection system for corpuscular radiation

System for receiving and retaining a substrate

The present invention provides for a device for holding a substrate in an exposure system. In the exposure system, the substrate is positioned on a table movable in the X and Y coordinates of an X, Y plane, and the exposure system provides a metering assembly between a table surface and the substrate to adjust the distance and to align the substrate in relation to an exposure optics, from where a corpuscular radiation is directed right-angled onto a substrate surface, corresponding to the Z coordinate. The device for holding the substrate includes two mounting plates aligned parallel to the X, Y plane, adjusted upon the table in a direction to the exposure optics and with different distances to the table surface, the first mounting plate of which being directly connected to the table. The second mounting plate is connected with the first mounting plate through at least one holding device, and has a bearing plane for the substrate being designed on that side of the second mounting plate turned to the exposure optics.

Holding device for a substrate

Growing community of inventors

Jena, Germany

Stefan Risse