14 Utility Patents
#19 in Excelsior, MN
#4,566 in Minnesota
#133,649 in US
#267,470 in the World
Forward Citations = 630
Company Filing History:
Submicron Systems, Inc.
Fsi International, Inc.
Fsi Corporation
4. 2 out of 1,207

5. 1 out of 831,952 patents
Other
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