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Trademarks = 1

Forward Citations = 229

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8 inventors (with patents filed for the assignee):

Richard Novak (5 out of 25 patents)

Robert W Grant (5 out of 14 patents)

James S Molinaro (4 out of 5 patents)

4. Jerzy Ruzyllo (1 out of 10 patents)

5. Eric Stupp (1 out of 1 patent)

6. Kevin Torek (1 out of 3 patents)

7. Robert H Grant (1 out of 1 patent)

8. Carlos M Ruiz (1 out of 1 patent)

10 patents: Sort by Forward Citations

1. 5807408 - Industrial robot safety device that shuts down operation in reponse to (1998-09-15),

2. 5625249 - Megasonic cleaning system (1997-04-29),

3. 5454677 - High temperature ceramic nut (1995-10-03),

4. 5437710 - Chemical processing system for maintaining concentration of (1995-08-01),

5. 5247954 - Megasonic cleaning system (1993-09-28),

6. 5234540 - Process for etching oxide films in a sealed photochemical reactor (1993-08-10),

7. 5228206 - Cluster tool dry cleaning system (1993-07-20),

8. 5149158 - Wafer carrier holder for wafer carriers (1992-09-22),

9. 5100190 - Wafer carrier holder for wafer carriers (1992-03-31),

10. 5082518 - Sparger plate for ozone gas diffusion (1992-01-21),

Submicron Systems, Inc. is a leading provider of cutting-edge semiconductor equipment and solutions. With a focus on delivering technologies for submicron level processing, we offer a wide range of products and services designed to meet the demands of the semiconductor industry. Our innovative solutions help customers achieve high precision and productivity in their manufacturing processes.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Jan 6 2026

10 Patents

#20 in Allentown, PA

#1,062 in Pennsylvania

#29,016 in US

#54,350 in the World

Allentown, PA, United States of America

Submicron Systems, Inc.