Averginos V Gelatos

Title: Averginos V Gelatos: Innovator in Tungsten Film Deposition

Introduction

Averginos V Gelatos is a notable inventor based in Redwood City, CA (US). He has made significant contributions to the field of materials science, particularly in the deposition of tungsten films. With a total of 2 patents to his name, Gelatos has developed innovative methods that enhance the performance and quality of tungsten layers used in various applications.

Latest Patents

Gelatos' latest patents include a method of depositing tungsten film with reduced resistivity and improved surface morphology. This method involves a two-stage deposition process that controls the resistivity and morphology of the tungsten film. The first stage includes introducing a continuous flow of a reducing gas and a pulsed flow of a tungsten-containing compound to deposit tungsten on a substrate. The second stage involves increasing the pressure in the process chamber and depositing a second film of the bulk tungsten layer.

Another significant patent focuses on methods for depositing tungsten layers employing atomic layer deposition techniques. This method outlines a process for forming a tungsten-containing layer on a substrate, which includes a barrier layer and a nucleation layer. The process utilizes various reducing gases and can employ different deposition techniques, ensuring high-quality tungsten layers.

Career Highlights

Averginos V Gelatos is currently employed at Applied Materials, Inc., a leading company in the semiconductor and materials engineering industry. His work at Applied Materials has allowed him to push the boundaries of tungsten film deposition technology, contributing to advancements in the field.

Collaborations

Throughout his career, Gelatos has collaborated with talented individuals such as Amit Khandelwal and Ken Kaung Lai. These collaborations have fostered an environment of innovation and have led to the development of cutting-edge technologies in tungsten film deposition.

Conclusion

Averginos V Gelatos is a prominent inventor whose work in tungsten film deposition has made a significant impact in the materials science field. His innovative patents and contributions to Applied Materials, Inc. highlight his dedication to advancing technology.