This inventor holds 2 USPTO granted patents. Top assignee: Nikon Corporation. Active years: 1994-1995.
Location History:
- Kanagawa, JP (1994)
- Yokohama, JP (1995)
Company Filing History:
Years Active: 1994-1995
Title: Innovations of Atsuyuki Aoki
Introduction
Atsuyuki Aoki is a prominent inventor based in Kanagawa, Japan. He has made significant contributions to the field of optical systems and lithographic techniques. With a total of 2 patents, Aoki's work has advanced the technology used in the manufacturing of devices such as liquid crystal displays.
Latest Patents
Aoki's latest patents include an innovative exposure method and a method and apparatus for the exposure process. The exposure method involves determining the imaging characteristics of a projection optical system by measuring the positions of multiple evaluation points on a photosensitive substrate. This method aims to minimize positional aberrations, ensuring optimal superposition of patterns based on the structure and directionality of the patterns used.
The second patent focuses on improving the stitching accuracy in the manufacture of large-area devices. By changing the position of the substrate during exposure and compensating for stitching errors, Aoki's method enhances the alignment of original images with the substrate, resulting in a composite exposed pattern of high precision.
Career Highlights
Atsuyuki Aoki is currently employed at Nikon Corporation, a leading company in imaging and optical products. His work at Nikon has allowed him to push the boundaries of technology in the field of lithography and optical systems.
Collaborations
Aoki has collaborated with notable coworkers such as Muneyasu Yokota and Masaichi Murakami. Their combined expertise has contributed to the successful development of innovative technologies in their respective fields.
Conclusion
Atsuyuki Aoki's contributions to the field of optical systems and lithographic techniques have made a significant impact on the industry. His innovative patents reflect his dedication to advancing technology and improving manufacturing processes.