This inventor holds 3 USPTO granted patents. Top assignee: Dainippon Screen Mfg. Co., Ltd.. Active years: 1987-1991.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 1987-1991
Title: Innovations of Atsushi Kikkawa
Introduction
Atsushi Kikkawa is a notable inventor based in Osaka, Japan. He has made significant contributions to the field of illumination systems and film thickness measurement technologies. With a total of 3 patents to his name, Kikkawa's work has had a considerable impact on various industries.
Latest Patents
One of Kikkawa's latest patents is an illumination system designed for contact or proximity exposure apparatuses. This system provides excellently collimated light without any irradiance reduction in the peripheral area of the object being illuminated. It includes a light source, an ellipsoidal mirror, and an optical system that ensures the entrance height of the light is proportioned to the tangent of the exit angle. Additionally, a single Fresnel lens is incorporated to minimize spherical aberration, resulting in a uniform irradiance distribution on the front surface of the lens.
Another significant patent is a film thickness measuring device and method. This apparatus measures the thickness of very thin transparent films, such as those found on photomasks or wafers for integrated circuits. The device utilizes diffracted reflected light converted photoelectrically by a one-dimensional image sensor array. With a high-resolution A/D converter, it can discriminate output levels into 1,000 graduations, enhancing precision in determining film thickness.
Career Highlights
Atsushi Kikkawa is currently employed at Dainippon Screen Mfg. Co., Ltd., where he continues to innovate and develop new technologies. His work has been instrumental in advancing the capabilities of illumination systems and film measurement techniques.
Collaborations
Kikkawa has collaborated with notable coworkers, including Noriyuki Kondo and Atsushi Tamada. Their combined expertise has contributed to the successful development of various projects and patents.
Conclusion
Atsushi Kikkawa's contributions to the fields of illumination systems and film thickness measurement demonstrate his innovative spirit and technical expertise. His patents reflect a commitment to advancing technology and improving industry standards.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile