Niigata, Japan

Atsuo Kitazawa


Average Co-Inventor Count = 3.2

ph-index = 3

Forward Citations = 60(Granted Patents)


Location History:

  • Nishiokitama, JP (1996)
  • Niigata, JP (2000)

Company Filing History:


Years Active: 1996-2000

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3 patents (USPTO):Explore Patents

Title: Atsuo Kitazawa: Innovator in Semiconductor Technology

Introduction

Atsuo Kitazawa is a prominent inventor based in Niigata, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on improving the efficiency and quality of semiconductor wafer processing.

Latest Patents

One of his latest patents is the "Vertical Wafer Boat." This invention addresses the issue of ceramic film peeling and enhances the longevity of the wafer boat. The design features front and rear sets of support rods that are symmetrically arranged, with multiple wafer mount groove portions formed in the rods. The materials used include a ceramic base, and the surfaces are coated with a high-purity ceramic film. The configuration of the groove portions is designed to optimize the mounting of semiconductor wafers.

Another notable patent is the "Jig for Semiconductor Wafers and Method for Producing the Same." This invention aims to minimize contamination from impurities, thereby improving wafer yield. The jig is constructed from high-purity carbon and features a SiC film applied through the CVD method. The surface treatment process ensures that the maximum surface roughness remains below 10 µm, significantly reducing the number of particles adhering to the surface.

Career Highlights

Atsuo Kitazawa is currently employed at Toshiba Ceramics Co., Ltd., where he continues to innovate in the semiconductor sector. His work has been instrumental in advancing the technology used in wafer processing, contributing to the overall efficiency of semiconductor manufacturing.

Collaborations

He has collaborated with notable colleagues such as Takashi Tanaka and Jun Yoshikawa, further enhancing the impact of his inventions in the industry.

Conclusion

Atsuo Kitazawa's contributions to semiconductor technology through his innovative patents demonstrate his commitment to improving manufacturing processes. His work continues to influence the field, ensuring higher quality and efficiency in semiconductor production.

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