This inventor holds 1 USPTO granted patent. Top assignee: Applied Materials, Inc.. Active years: 2019.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2019
Title: Arunkumar M. Tatti and His Patent on Substrate Deformity Correction.
Introduction
Arunkumar M. Tatti is an inventor associated with Haveri, India, and Applied Materials, Inc. His patent work addresses equipment and methods for correcting substrate deformity during processing.
Latest Patents
Tatti is associated with 1 patent: “Methods and Apparatus for Correcting Substrate Deformity.” The patent describes a substrate support with infrared lamps housed within a base, a support plate for holding a substrate, and a cover plate with perforations connected to an exhaust conduit. It also describes showerhead assemblies and processing equipment incorporating the substrate support and showerhead assembly.
Career Highlights
Tatti’s listed patent reflects work on substrate-processing equipment and techniques intended to correct deformity. His company affiliation is Applied Materials, Inc.
Collaborations
His listed coworkers include Shoju Vayyapron and Eng Sheng Peh.
Conclusion
Arunkumar M. Tatti’s patent focuses on substrate support and processing equipment designed to help correct substrate deformity.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile