Arthur L Morsell

Title: Arthur L. Morsell: Innovator in Laser Plasma Technology

Introduction

Arthur L. Morsell is a notable inventor based in Del Mar, California. He has made significant contributions to the field of photolithography through his innovative patents. With a total of 2 patents, Morsell's work focuses on advancing laser plasma technology.

Latest Patents

One of Morsell's latest patents is a laser plasma X-ray source designed for use in photolithography. This invention utilizes an electro-optical shutter to trim the output pulse from a master oscillator to a desired duration. The pulse is then divided into several pieces that travel along various optical delay paths, allowing them to pass sequentially through a laser power amplifier. After amplification, the pieces are reassembled and focused at the plasma target. In the first embodiment, polarization and angle coding methods are employed to distinguish each pulse piece as it travels along the delay paths. The second embodiment replaces polarization coding with additional angle coding transverse to the plane of the angles used in the first embodiment. An expander/reducer lens assembly is incorporated in both embodiments to reduce the angles between the beam paths, enabling more beams to fit closely within the laser amplifier gain region.

Career Highlights

Arthur L. Morsell is associated with California Jamar, Incorporated, where he continues to innovate in the field of laser technology. His work has been instrumental in enhancing the capabilities of photolithography, which is crucial for the semiconductor industry.

Collaborations

Morsell collaborates with Henry Shields, contributing to the development of advanced technologies in their field.

Conclusion

Arthur L. Morsell's contributions to laser plasma technology and photolithography demonstrate his commitment to innovation. His patents reflect a deep understanding of complex optical systems and their applications in modern technology.