California Jamar, Incorporated

Arthur L Morsell

Henry Shields

A laser plasma X-ray source for use in photolithography is disclosed wherein an electro-optical shutter is used to trim the output pulse from a master oscillator to a desired duration. The pulse is then split into several pieces which travel along various optical delay paths so that the pieces pass sequentially through a laser power amplifier. After amplification, the pieces are reassembled and then focussed at the plasma target. In a first embodiment, polarization and angle coding methods are used to distinguish each pulse piece at it travels along the delay paths. In a second embodiment, polarization coding is replaced by additional angle coding transverse to the plane of the angles of the first embodiment. An expander/reducer lens assembly is used in both embodiments to reduce the angles between the beam paths and allow more beams to fit closely to the laser amplifier gain region.

Laser plasma X-ray source

A laser plasma X-ray source for use in photolithography is disclosed wherein an electro-optical shutter is used to trim the output pulse from a master oscillator to a desired duration. The pulse is then split into several pieces which travel along various optical delay paths so that the pieces pass sequentially through a laser power amplifier. After amplification, the pieces are reassembled and then focussed at the plasma target. In a first embodiment, polarization and angle coding methods are used to distinguish each pulse piece as it travels along the delay paths. In a second embodiment, polarization coding is replaced by additional angle coding transverse to the plane of the angles of the first embodiment. An expander/reducer lens assembly is used in both embodiments to reduce the angles between the beam paths and allow more beams to fit closely to the laser amplifier gain region.

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Del Mar, CA, United States of America

Arthur L Morsell