Company Filing History:
Years Active: 2001-2006
Title: Arkadiy I Shimanovich: Innovator in High-Pressure Reactor Technologies
Introduction
Arkadiy I Shimanovich is a notable inventor based in San Francisco, CA. He has made significant contributions to the field of high-pressure reactor technologies, holding three patents that showcase his innovative spirit and technical expertise.
Latest Patents
One of his latest patents is a method and apparatus for sealing a substrate load port in a high-pressure reactor. This invention provides a processing chamber capable of operating at high pressures, featuring a chamber door that seals against the internal surface of the chamber. The internal pressure assists in sealing the door, ensuring efficient operation. Another significant patent involves the measurement of substrate temperature in a process chamber using non-contact filtered infrared pyrometry. This apparatus allows for accurate temperature measurement of a substrate, utilizing a window that isolates the heating source while enabling the detection of energy emitted directly from the substrate.
Career Highlights
Arkadiy works at Novellus Systems Incorporated, where he applies his expertise in developing advanced technologies for semiconductor manufacturing. His innovative approaches have contributed to the efficiency and safety of processing chambers in high-pressure environments.
Collaborations
He has collaborated with notable colleagues, including Krishnan Shrinivasan and Vladimir Starov, to further enhance the capabilities of their technologies.
Conclusion
Arkadiy I Shimanovich's work exemplifies the spirit of innovation in high-pressure reactor technologies. His patents reflect a commitment to advancing the field and improving processes in semiconductor manufacturing.