Aree Hanprasopwattana

Title: Aree Hanprasopwattana: Innovator in Semiconductor Cleaning Technology

Introduction

Aree Hanprasopwattana is a notable inventor based in Milpitas, CA (US). She has made significant contributions to the field of semiconductor technology, particularly in the area of cleaning processes for deposition chambers. Her innovative approach has led to the development of a patented method that enhances the efficiency and effectiveness of semiconductor manufacturing.

Latest Patents

Aree holds a patent for a method titled "Plasma clean for a semiconductor thin film deposition chamber." This invention describes a process useful for cleaning the inner surfaces of a deposition chamber, including the deposition station or showerhead area. The method involves supplying a fluorine-containing source gas, such as NF, SF, or C F, to the chamber and energizing it with radio frequency to form a plasma containing fluorine atoms and ions. The radio frequency power is modulated between a maximum value during the "plasma-ON period" and a minimum value of zero during the "plasma-OFF period." This innovative cleaning process can be conducted in situ after film deposition on wafers, followed by a conventional continuous-RF clean process.

Career Highlights

Aree is currently employed at Novellus Systems Incorporated, where she continues to advance her research and development efforts in semiconductor technology. Her work has been instrumental in improving cleaning processes that are critical for maintaining the quality and performance of semiconductor devices.

Collaborations

Aree has collaborated with esteemed colleagues, including Bart Jan Van Schravendijk and Edward J Augustyniak. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas within the semiconductor industry.

Conclusion

Aree Hanprasopwattana's contributions to semiconductor cleaning technology exemplify her dedication to innovation and excellence. Her patented methods are paving the way for advancements in the manufacturing processes of semiconductor devices.