Anwer Husain

Title: Anwer Husain: Innovator in Plasma Processing Technology

Introduction

Anwer Husain is a notable inventor based in Pleasanton, California. He has made significant contributions to the field of plasma processing technology. His innovative work has led to the development of a unique patent that enhances the efficiency of plasma processing chambers.

Latest Patents

Anwer Husain holds a patent for a "Plasma processing chamber with a grounded electrode assembly." This optimized plasma processing chamber is designed to provide a current path and includes several key components. The chamber features an upper electrode, a powered lower electrode, a heating plate, a cooling plate, a plasma chamber lid, and a clamp ring. The heating plate is configured to heat the upper electrode, while the cooling plate is designed to cool it. Additionally, the clamp ring secures the upper electrode to the plasma chamber lid and facilitates the current path. A pocket is formed between the clamp ring and the upper electrode to accommodate the heater plate, allowing for thermal expansion during repetitive thermal cycling. Anwer Husain's patent represents a significant advancement in plasma processing technology, with 1 patent to his name.

Career Highlights

Anwer Husain is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has allowed him to apply his innovative ideas in a practical setting, contributing to the advancement of plasma processing technologies.

Collaborations

Anwer collaborates with Arnold Kholodenko, a fellow innovator in the field. Their partnership exemplifies the importance of teamwork in driving technological advancements.

Conclusion

Anwer Husain's contributions to plasma processing technology through his innovative patent highlight his role as a significant inventor in the industry. His work continues to influence advancements in semiconductor manufacturing processes.