This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Lam Research Corporation. Active years: 2024.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2024
Title: The Innovative Contributions of Anthony Nguyen
Introduction
Anthony Nguyen is a notable inventor based in Pleasanton, California. He has made significant contributions to the field of substrate processing systems. His work is characterized by a focus on enhancing the efficiency and effectiveness of processing chambers used in various applications.
Latest Patents
One of Anthony Nguyen's key patents is titled "Substrate processing system including coil with RF powered Faraday shield." This innovative system includes a processing chamber with a dielectric window and a substrate support designed to hold a substrate. A coil is positioned outside the processing chamber, adjacent to the dielectric window, while a Faraday shield is strategically placed between the coil and the dielectric window. The system is powered by an RF generator that supplies RF power to the coil, which is coupled to the Faraday shield through stray capacitance or direct coupling. Additionally, a capacitor is connected to either the coil or the Faraday shield to adjust the position of a voltage standing wave along the coil. This patent showcases Nguyen's expertise in developing advanced technologies for substrate processing.
Career Highlights
Anthony Nguyen is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His role at Lam Research allows him to apply his innovative ideas and contribute to the development of cutting-edge technologies. His work has been instrumental in advancing the capabilities of substrate processing systems.
Collaborations
Throughout his career, Anthony has collaborated with talented individuals such as Shen Peng and Tamarak Pandhumsoporn. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of innovative solutions.
Conclusion
Anthony Nguyen's contributions to the field of substrate processing systems highlight his innovative spirit and dedication to advancing technology. His patent and work at Lam Research Corporation reflect his commitment to excellence in the semiconductor industry.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile